F-400/3500 turbomolecular pump
F-400/3500 turbo molecular pump
model F-400/3500 / F-400 / 3500N
Pumping rate (L / s) 3500 / 3500
Compression ratio N2: 108; H2: 5 × 102/ N2: 108; H2: 5 × 102
Ultimate pressure (Pa) ≤6 × 10-6 / ≤6 × 10-6
Exhaust port flange DN100 LF /DN100 LF
Air inlet flange DN400 LF / DN400 LF
Bearing Precision Ceramic Bearing/ Precision ceramic bearings (required pass protective gas)
Start Time (min) <18 / <18
Rated speed (rpm) 13,500 / 13,500
Vibration value ((mm)) ≤0.5 / ≤0.5
Recommend forepump (L / s) 30 / 30
Cooling water temperature (℃) ≤25/ ≤25
Pump baking temperature (℃) ≤80 /≤80
Ambient Temperature (℃) 5-40 /5-40
Oil-filled volume (ml) 150/ 150
Faucets The inner diameter of Φ10-line self-sealing/The inner diameter of Φ10-line self-sealing
Installation Vertical ± 5 °/Vertical ± 5 °
Weight (kg) 136/136
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